A static turbine flow meter with a micromachined silicon torque sensor
2001 (English)In: MEMS 2001, 2001, 208-211 p.Conference paper (Refereed)
A new class of flow sensors is introduced where a static turbine converts the volume flow into a torque. In contrast to conventional turbine meters, the wheel does not rotate and consequently it is not sensitive to bearing friction and wear that a rotating wheel experiences. The sensor performance has been evaluated for different blade lengths and blade angles and a model is given to predict the influence of these parameters. Optimization of the wheel can be done in terms of maximizing the sensitivity/pressure-loss ratio. The most efficient wheel in this analysis has a blade length of 2.7 mm and a blade angle of 30° giving a sensitivity of 4.0 μV/V/(1/min) when measured using a new silicon torque sensor design.
Place, publisher, year, edition, pages
2001. 208-211 p.
Micromachining, Optimization, Silicon sensors, Torque, Turbomachine blades, Wear of materials, Static turbine flow meter, Flowmeters
IdentifiersURN: urn:nbn:se:kth:diva-25380DOI: 10.1109/MEMSYS.2001.906515ISBN: 0-7803-5998-4OAI: oai:DiVA.org:kth-25380DiVA: diva2:357647
A static turbine flow meter with a micromachined silicon torque sensor 21 jan 2001 - 25 jan 2001, Interlaken , Switzerland
QC 201010192010-10-192010-10-192010-10-19Bibliographically approved