Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Barbed spike arrays for mechanical chip attachment
KTH, Superseded Departments, Signals, Sensors and Systems.
KTH, Superseded Departments, Signals, Sensors and Systems.
KTH, Superseded Departments, Signals, Sensors and Systems.ORCID iD: 0000-0001-9552-4234
2001 (English)In: Proceedings of the IEEE Micro Electro Mechanical Systems: MEMS 2001, 2001, no MEMS, p. 46-49Conference paper, Published paper (Refereed)
Abstract [en]

We fabricated and tested two types of microstructures for the mechanical attachment of chips to soft surfaces. The microstructures are barbed spikes etched in silicon using DRIE (Deep Reactive Ion Etching). The mechanical attachment of two types of barbed spike arrays was measured on nonbiological materials (Polyethylene foil, Aluminium foil and ParafilmTM) as well as on human skin. The maximum adhesion force was 1,36 N achieved by a 2×2 mm2 chip containing 64 barbed spikes pressed in Polyethylene foil. Maximum adhesion in skin was 0,54 N. The shape of the two different barb types has significant influence on the detachment forces for nonbiological materials

Place, publisher, year, edition, pages
2001. no MEMS, p. 46-49
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-25377DOI: 10.1109/MEMSYS.2001.906475ISBN: 0-7803-5998-4 (print)OAI: oai:DiVA.org:kth-25377DiVA, id: diva2:357696
Conference
The 14th IEEE International Conference on Micro Electro Mechanical Systems, 21 jan 2001 - 25 jan 2001, Interlaken , Switzerland
Note
Q 20101019Available from: 2010-10-19 Created: 2010-10-19 Last updated: 2010-10-19Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full textIEEE

Authority records BETA

Stemme, Göran

Search in DiVA

By author/editor
Griss, PatrickEnoksson, PeterStemme, Göran
By organisation
Signals, Sensors and Systems
Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar

doi
isbn
urn-nbn

Altmetric score

doi
isbn
urn-nbn
Total: 21 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf