RF MEMS high-impedance tuneable metamaterials for millimeter-wave beam steering
2009 (English)In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, 2009, no MEMS, 896-899 p.Conference paper (Refereed)
This paper presents the design, fabrication and evaluation of RF MEMS analog tuneable metamaterial highimpedance surfaces (HIS). These miniaturized structures are designed for W-band beam steering applications and are intended to replace a large multi-component subsystem by a single chip. Furthermore, the MEMS tuneable microwavemeta materials of this paper present a new class of microsystems interacting with microwaves, by uniquely combining the functionality of the microwave structures with the tuning MEMS actuators in one and the same distributed surface elements. A high-impedance surface array with 200 x 52 elements and a pitch of 350 Wtm has been successfully fabricated and evaluated. The device features monocrystalline silicon membranes which are transfer-bonded on a multi-wafer silicon-glass substrate. The measured pull-in voltage is 15.9 V. Microwave measurements from 70 GHz to 114 GHz confirm the frequency selective nature of the surface. The fabricated devices showed a resonance frequency of 111.3 GHz to 111.8 GHz with losses ranging from -18 dB to -23 dB at the resonance and from -5 dB to -7 dB outside the resonance, which is worse than theoretically predicted but mainly attributed to imperfections in the design and fabrication of the first prototypes. ï¿œ2009 IEEE.
Place, publisher, year, edition, pages
2009. no MEMS, 896-899 p.
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-25368DOI: 10.1109/MEMSYS.2009.4805528ISI: 000341431500224ScopusID: 2-s2.0-65949096652ISBN: 978-1-4244-2977-6OAI: oai:DiVA.org:kth-25368DiVA: diva2:357870
IEEE 22nd International Conference on Micro Electro Mechanical Systems
QC 201010202010-10-202010-10-192015-06-10Bibliographically approved