Novel concept of microwave mems reconfigurable 7X45o multi-stage dielectric-block phase shifter
2009 (English)In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, 2009, no MEMS, 15-18 p.Conference paper (Refereed)
A novel concept of ultra-broadband multi-stage digital-type microwave MEMS phase shifters with the best performance optimized for W-band applications is introduced in this paper. The relative phase shift of 45ï¿œ of a single stage is achieved by vertically moving a ?/2-long high-resistivity silicon dielectric block above a 3D micromachined coplanar waveguide (3D CPW) by electrostatic actuation, resulting in different propagation constants of the microwave signal for the up-state and the down-state. For full 360ï¿œ phase-shift capability, seven stages are cascaded. The devices are fabricated and assembled by wafer-scale processes using bulk and surface micromachining. The measurement results of the first prototypes show that the W-band return and insertion loss of a single 45ï¿œ stage is better than -15 dB and -1.7 dB, respectively, while the 7-stage phase shifter has a return loss better than -12 dB with an insertion loss less than -4 dB. The phase shifters also perform well from 1- 10 GHz.
Place, publisher, year, edition, pages
2009. no MEMS, 15-18 p.
Assembly, Coplanar waveguides, Dielectrics, Electrostatic actuators, Insertion loss, Micromechanical devices, Microwave devices, Phase shifters, Propagation constant, Silicon
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-25365DOI: 10.1109/MEMSYS.2009.4805307ISI: 000341431500004ScopusID: 2-s2.0-65949124715ISBN: 978-1-4244-2978-3 (E-ISBN)ISBN: 978-1-4244-2977-6 (Print-ISBN)OAI: oai:DiVA.org:kth-25365DiVA: diva2:358036
IEEE 22nd International Conference on Micro Electro Mechanical Systems, Sorrento, Jan 25-29, 2009
QC 201112142010-10-202010-10-192015-06-11Bibliographically approved