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Novel concept of microwave mems reconfigurable 7X45o multi-stage dielectric-block phase shifter
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
2009 (English)In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, 2009, no MEMS, 15-18 p.Conference paper, Published paper (Refereed)
Abstract [en]

A novel concept of ultra-broadband multi-stage digital-type microwave MEMS phase shifters with the best performance optimized for W-band applications is introduced in this paper. The relative phase shift of 45ᅵ of a single stage is achieved by vertically moving a ?/2-long high-resistivity silicon dielectric block above a 3D micromachined coplanar waveguide (3D CPW) by electrostatic actuation, resulting in different propagation constants of the microwave signal for the up-state and the down-state. For full 360ᅵ phase-shift capability, seven stages are cascaded. The devices are fabricated and assembled by wafer-scale processes using bulk and surface micromachining. The measurement results of the first prototypes show that the W-band return and insertion loss of a single 45ᅵ stage is better than -15 dB and -1.7 dB, respectively, while the 7-stage phase shifter has a return loss better than -12 dB with an insertion loss less than -4 dB. The phase shifters also perform well from 1- 10 GHz.

Place, publisher, year, edition, pages
2009. no MEMS, 15-18 p.
Keyword [en]
Assembly, Coplanar waveguides, Dielectrics, Electrostatic actuators, Insertion loss, Micromechanical devices, Microwave devices, Phase shifters, Propagation constant, Silicon
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-25365DOI: 10.1109/MEMSYS.2009.4805307ISI: 000341431500004Scopus ID: 2-s2.0-65949124715ISBN: 978-1-4244-2978-3 (print)ISBN: 978-1-4244-2977-6 (print)OAI: oai:DiVA.org:kth-25365DiVA: diva2:358036
Conference
IEEE 22nd International Conference on Micro Electro Mechanical Systems, Sorrento, Jan 25-29, 2009
Note

QC 20111214

Available from: 2010-10-20 Created: 2010-10-19 Last updated: 2015-06-11Bibliographically approved

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Stemme, Göran

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