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CMOS-integrable piston-type micro-mirror array for adaptive optics made of mono-crystalline silicon using 3-D integration
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0002-0525-8647
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2009 (English)In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, IEEE conference proceedings, 2009, no MEMS, 1007-1010 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper presents a novel CMOS-compatible fabrication process and evaluations of a micro mirror array (MMA) made of mono-crystalline silicon (m-Si) for adaptive optic (AO) applications. The m-Si mirror layer is transfer bonded from a silicon-on-insulator (SOI) donor wafer with adhesive wafer bonding towards an intermediate patterned polymer spacer layer and clamped with metal plating. We present a CMOS compatible, bond alignment-free fabrication scheme offering the potential for high air gap distances between substrate and mirrors and we show first measurements of the fabricated mirrors.

Place, publisher, year, edition, pages
IEEE conference proceedings, 2009. no MEMS, 1007-1010 p.
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-25363DOI: 10.1109/MEMSYS.2009.4805556ISI: 000341431500252Scopus ID: 2-s2.0-65949110371ISBN: 978-1-4244-2978-3 (print)ISBN: 978-1-4244-2977-6 (print)OAI: oai:DiVA.org:kth-25363DiVA: diva2:358524
Conference
IEEE 22nd International Conference on : Micro Electro Mechanical Systems
Note

QC 20101022

Available from: 2010-10-22 Created: 2010-10-19 Last updated: 2015-12-03Bibliographically approved

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Niklaus, FrankStemme, Göran

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