Gigahertz Sandwich Strip Inductors Based on Fe-N Films: The Effect of Flux Closure at the Flange
2010 (English)In: IEEE transactions on magnetics, ISSN 0018-9464, E-ISSN 1941-0069, Vol. 46, no 6, 2097-2100 p.Article in journal (Refereed) Published
Planar strip inductors consisting of soft Fe-N films enclosing a conductor made of Cu are fabricated on Si substrates and exhibit 70 to 100% inductance gain at 1 Ghz with quality factors of 3 to 5. The magnetic part of the inductance is less than predicted theoretically, which is attributed to hardening of the magnetic material at the edges of the strip, where the deposition is close to 60 degrees incidence. Test films were fabricated on tilted substrates and found to develop very high anisotropy for deposition angles larger than 30 degrees. Optimizing the flux closure at the strip edges is essential for further improving the performance of sandwich strip inductors.
Place, publisher, year, edition, pages
2010. Vol. 46, no 6, 2097-2100 p.
Gigahertz inductors, magnetic multilayers
Condensed Matter Physics
IdentifiersURN: urn:nbn:se:kth:diva-27586DOI: 10.1109/TMAG.2010.2044639ISI: 000278037800213ScopusID: 2-s2.0-77952874354OAI: oai:DiVA.org:kth-27586DiVA: diva2:377447
QC 201012142010-12-142010-12-132010-12-14Bibliographically approved