Assessment of digital cameras for micro-structural sensing of low contrast surface features
2005 (English)In: Proceedings of the First International Conference on Multi-Material Micro Manufacture 2005, Karlsruhe, DE / [ed] Wolfgang Menz and Stefan Dimov, Amsterdam: Elsevier, 2005, 253-257 p.Conference paper (Refereed)
Evaluation of three digital cameras are presented focusing on their capabilities and applicability in the detection of low-contrast surface features on the micrometer level. The key to a successful identification of surface flaws on microstructured surfaces, such as silicon wafers is the ability to determine minor deviations in the reflectance of an object surface. Micro-topography of a surface, surface structure and surface roughness has a strong influence on the amount and direction of scattered light. Different portions of the surrounding illumination are reflected on different parts of an uneven surface, hence the resulting contrast-variation on the illuminated surface has a strong correlation to the surface structure itself. In our work we discuss the possibilities of using either of the investigated cameras for the automated visual inspection of micro-structured surfaces. The cameras - two of them equipped with CCD and one with CMOS image sensors - are studied in an environment which is similar to standard surface appearance measurements, involving human observers. The specimens, featuring different surface structures are imaged in a well-controlled environment under varying illumination conditions. Experimental results of spatial resolution and contrast sensitivity are presented.
Place, publisher, year, edition, pages
Amsterdam: Elsevier, 2005. 253-257 p.
surface quality, appearance, digital camera, machine vision
Production Engineering, Human Work Science and Ergonomics Nano Technology
IdentifiersURN: urn:nbn:se:kth:diva-27702ISBN: 0-080-44879-8OAI: oai:DiVA.org:kth-27702DiVA: diva2:379814
4M 2005, 29 June - 1 July 2005, Karlsruhe, Germany
Projects4M Multi Material Micro Manufacture Network of Excellence
QC 201012202010-12-202010-12-202012-02-29Bibliographically approved