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Assessment of digital cameras for micro-structural sensing of low contrast surface features
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics.
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics.ORCID iD: 0000-0002-0105-4102
2005 (English)In: Proceedings of the First International Conference on Multi-Material Micro Manufacture 2005, Karlsruhe, DE / [ed] Wolfgang Menz and Stefan Dimov, Amsterdam: Elsevier, 2005, 253-257 p.Conference paper, Published paper (Refereed)
Abstract [en]

Evaluation of three digital cameras are presented focusing on their capabilities and applicability in the detection of low-contrast surface features on the micrometer level. The key to a successful identification of surface flaws on microstructured surfaces, such as silicon wafers is the ability to determine minor deviations in the reflectance of an object surface. Micro-topography of a surface, surface structure and surface roughness has a strong influence on the amount and direction of scattered light. Different portions of the surrounding illumination are reflected on different parts of an uneven surface, hence the resulting contrast-variation on the illuminated surface has a strong correlation to the surface structure itself. In our work we discuss the possibilities of using either of the investigated cameras for the automated visual inspection of micro-structured surfaces. The cameras - two of them equipped with CCD and one with CMOS image sensors - are studied in an environment which is similar to standard surface appearance measurements, involving human observers. The specimens, featuring different surface structures are imaged in a well-controlled environment under varying illumination conditions. Experimental results of spatial resolution and contrast sensitivity are presented.

Place, publisher, year, edition, pages
Amsterdam: Elsevier, 2005. 253-257 p.
Keyword [en]
surface quality, appearance, digital camera, machine vision
National Category
Production Engineering, Human Work Science and Ergonomics Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-27702ISBN: 0-080-44879-8 (print)OAI: oai:DiVA.org:kth-27702DiVA: diva2:379814
Conference
4M 2005, 29 June - 1 July 2005, Karlsruhe, Germany
Projects
4M Multi Material Micro Manufacture Network of Excellence
Note
QC 20101220Available from: 2010-12-20 Created: 2010-12-20 Last updated: 2012-02-29Bibliographically approved
In thesis
1. Light scattering: a tool for measurement of rapid displacements and surface appearance
Open this publication in new window or tab >>Light scattering: a tool for measurement of rapid displacements and surface appearance
2010 (English)Licentiate thesis, comprehensive summary (Other academic)
Place, publisher, year, edition, pages
Stockholm: US-AB, 2010. vi, 55 p.
Series
Trita-IIP, ISSN 1650-1888 ; 2010:04
Keyword
light scattering, reflectance, BRDF, brightness, industrial metrology, optical fiber, optical properties, perception, roughness, surface topography
National Category
Engineering and Technology
Identifiers
urn:nbn:se:kth:diva-27705 (URN)978-91-7415-701-7 (ISBN)
Presentation
2010-08-27, M311, KTH, Brinellvägen 68, Sockholm, 10:00
Opponent
Supervisors
Note
QC 20101220Available from: 2010-12-20 Created: 2010-12-20Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
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