High-Q photonic crystal surface-mode cavities on crystalline SOI structures
2010 (English)In: Optics Communications, ISSN 0030-4018, E-ISSN 1873-0310, Vol. 283, no 11, 2461-2464 p.Article in journal (Refereed) Published
High-Q side-coupled surface-mode cavities in two-dimensional (2D) photonic crystals on crystalline silicon-on-insulator (SOI) structures are demonstrated. One of the surface-mode cavities has the measured system Q factor and intrinsic Q factor of 6200 and 13,400, respectively. The experimental results show that the value of system Q factor is ten times and the intrinsic Q factor six times higher than those of similar structures on amorphous SOI structures, respectively, due to the intrinsic material loss is much lower for crystalline silicon. The Q factors of cavities can be further improved by spin-on-glass overlayers, for increasing the structural symmetry. After the spin-on-glass process, the system Q factor and the intrinsic Q factor become nearly twice higher. Meanwhile, the drop wavelengths are largely red-shifted. (C) 2010 Elsevier B.V. All rights reserved.
Place, publisher, year, edition, pages
2010. Vol. 283, no 11, 2461-2464 p.
Atom and Molecular Physics and Optics
IdentifiersURN: urn:nbn:se:kth:diva-27850DOI: 10.1016/j.optcom.2010.02.011ISI: 000277824200029ScopusID: 2-s2.0-77950295905OAI: oai:DiVA.org:kth-27850DiVA: diva2:386624
FunderSwedish Research Council
QC 201101132011-01-132011-01-032011-05-24Bibliographically approved