Soft x-ray zone plate fabrication at KTH, Stockholm
2009 (English)In: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 186Article in journal (Refereed) Published
We present the status of our zone plate and test object fabrication processes along with the latest fabricated components. With our nickel process, zone plates with outermost zone width of 20 nm and zone height of 90 nm have been fabricated. A gold electroplating process has recently been introduced for the fabrication of test objects. The first result for gold gratings with 70 nm period and 135 nm height is shown.
Place, publisher, year, edition, pages
2009. Vol. 186
IdentifiersURN: urn:nbn:se:kth:diva-29225DOI: 10.1088/1742-6596/186/1/012065ISI: 000282023900065ScopusID: 2-s2.0-73349092143OAI: oai:DiVA.org:kth-29225DiVA: diva2:392973
QC 201101282011-01-282011-01-272011-01-28Bibliographically approved