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AlGaN/AlN multiple quantum wells grown by MOVPE on AlN templates using nitrogen as a carrier gas
KTH, School of Information and Communication Technology (ICT), Microelectronics and Applied Physics, MAP.
KTH, School of Information and Communication Technology (ICT), Microelectronics and Applied Physics, MAP.
KTH, School of Information and Communication Technology (ICT), Microelectronics and Applied Physics, MAP.ORCID iD: 0000-0002-4606-4865
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2008 (English)In: Journal of Crystal Growth, ISSN 0022-0248, E-ISSN 1873-5002, Vol. 310, no 23, 4927-4931 p.Article in journal (Refereed) Published
Abstract [en]

AlxGa1-xN/AlN multiple quantum wells (MQWs) structures were grown by metalorganic vapour phase epitaxy (MOVPE) on pseudo AlN substrates using nitrogen as a carrier gas. Results of X-ray diffraction (XRD) and reciprocal space mapping (RSM) indicated no sign of strain relaxation in the quantum wells with respect to the AlN substrate. The MQW parameters such as thicknesses, growth rates and material compositions were extracted from XRD measurements and demonstrated an agreement with our growth conditions. No indication of parasitic reactions between ammonia and trimethyl-aluminium (TMAI) was detected in our growth process. Optical measurements revealed well-defined photoluminescence peaks at 288 and 280 nm, which are in a good agreement with the transmission experimental data. The piezoelectric field value in the Studied structures was estimated to be 900kV/cm.

Place, publisher, year, edition, pages
2008. Vol. 310, no 23, 4927-4931 p.
Keyword [en]
Metalorganic vapour phase epitaxy, AlGaN, Nitrides, Semiconducting gallium compounds
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-31568DOI: 10.1016/j.jcrysgro.2008.08.040ISI: 000262019400054Scopus ID: 2-s2.0-56549090672OAI: oai:DiVA.org:kth-31568DiVA: diva2:405033
Note
QC 20110321Available from: 2011-03-21 Created: 2011-03-18 Last updated: 2017-12-11Bibliographically approved

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Marcinkevicius, Saulius

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