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High Sensitive Gas Sensor Application Based on a Small Defect in Silicon Waveguide
KTH, School of Electrical Engineering (EES), Electromagnetic Engineering.
KTH, School of Information and Communication Technology (ICT), Microelectronics and Applied Physics, MAP.
2009 (English)In: IEEE Photonics Technology Letters, ISSN 1041-1135, E-ISSN 1941-0174, Vol. 21, no 1-4, p. 82-84Article in journal (Refereed) Published
Abstract [en]

A small defect in silicon nanowire waveguides is applied for gas sensors. Small defects with some special shapes and indexes can produce strong resonances with the incident light and induce large loss. Since the silicon waveguide has air cladding, the position of resonant peaks will be sensitive for the variation of the ambient air composition. The sensor based on the principle has a high sensitivity. As an example, we monitored the change of the position of the resonance peak as a function of alcohol concentrations in air. Results showed that a similar to 5-mg/L ethanol vapor in the air can result in a similar to 20-nm wavelength shift of the resonance.

Place, publisher, year, edition, pages
2009. Vol. 21, no 1-4, p. 82-84
Keyword [en]
Gas sensor, integrated optics, planar waveguides, waveguide deposition
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-32710DOI: 10.1109/LPT.2008.2008662ISI: 000263480100026Scopus ID: 2-s2.0-67149092287OAI: oai:DiVA.org:kth-32710DiVA, id: diva2:411729
Note
QC 20110419Available from: 2011-04-19 Created: 2011-04-18 Last updated: 2017-12-11Bibliographically approved

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