Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Equilibrium analysis of zirconium carbide CVD growth
Show others and affiliations
2007 (English)In: Journal of Crystal Growth, ISSN 0022-0248, E-ISSN 1873-5002, Vol. 307, no 2, 302-308 p.Article in journal (Refereed) Published
Abstract [en]

A chemical equilibrium study was performed to investigate the effect of growth parameters on the constitution in ZrC films grown by chemical vapor deposition (CVD). The equilibrium analysis of the Zr-C-H system demonstrated that ZrC (fec) deposition is favorable and that a certain minimum amount of hydrogen should prevent co-deposition of elemental carbon over a wide range of temperature, pressure, and inlet C/Zr atom ratio. The results of the equilibrium analysis were compared to the phase constitution of films grown by low-pressure metalorganic CVD (< 10(-4) Torr). Only carbon-rich ZrC films were grown and demonstrated the possibility of an aerosolassisted CVD approach to stoichiometric ZrC film growth.

Place, publisher, year, edition, pages
2007. Vol. 307, no 2, 302-308 p.
Keyword [en]
phase equilibria, equilibrium analysis, metalorganic chemical vapor deposition, zirconium carbide
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:kth:diva-37304DOI: 10.1016/j.jcrysgro.2007.05.039ISI: 000250245900009Scopus ID: 2-s2.0-34548415469OAI: oai:DiVA.org:kth-37304DiVA: diva2:432997
Available from: 2011-08-08 Created: 2011-08-08 Last updated: 2017-12-08Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Search in DiVA

By author/editor
Perez, Rosa J.
By organisation
Computational Thermodynamics
In the same journal
Journal of Crystal Growth
Materials Engineering

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 54 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf