Change search
ReferencesLink to record
Permanent link

Direct link
Reduced self-heating by strained silicon substrate engineering
Show others and affiliations
2008 (English)In: Applied Surface Science, ISSN 0169-4332, E-ISSN 1873-5584, Vol. 254, no 19, 6182-6185 p.Article in journal (Refereed) Published
Abstract [en]

Substrate engineering innovations such as SOI and the use of Si/SiGe virtual substrates become necessary in order to maintain performance leverage of integrated circuits with continued scaling. The relevance of thermal effects in device design increases since the thermal conductivity of these new materials is poor. The electrical performance of devices fabricated on thin virtual substrates grown by two different techniques is presented. It is found that self-heating is reduced and that thermal resistance measurements agree with modelling predictions. The reduction in performance enhancement seen in many strained Si MOSFETs is found here to be largely due to self-heating effects, rather than parasitics or the loss of strain.

Place, publisher, year, edition, pages
2008. Vol. 254, no 19, 6182-6185 p.
Keyword [en]
strained silicon, self heating, MOSFET
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
URN: urn:nbn:se:kth:diva-38080DOI: 10.1016/j.apsusc.2008.02.172ISI: 000256932500043ScopusID: 2-s2.0-45049087611OAI: diva2:436543
5th International Symposium on the Control of Semiconductor Interf Location: Tokyo Metropolitan Univ, Tokyo, JAPAN Date: NOV 12-14, 2007Available from: 2011-08-24 Created: 2011-08-22 Last updated: 2011-08-24Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Search in DiVA

By author/editor
Hellström, Per-ErikÖstling, Mikael
By organisation
Integrated Devices and Circuits
In the same journal
Applied Surface Science
Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 15 hits
ReferencesLink to record
Permanent link

Direct link