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Photonic crystal waveguides with propagation losses in the 1 dB/mm range
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2004 (English)In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 22, no 6, 3356-3358 p.Article in journal (Refereed) Published
Abstract [en]

High-quality photonic crystal waveguides have been fabricated in the InGaAsP/InP and GaAs/AlGaAs material systems aimed at the communication wavelengths of 1.55 and 1.31 mum. The waveguides consist of omitted rows of holes in a triangular lattice of air holes etched into the semiconductor heterostructures by electron cyclotron resonance reactive ion etching. Efficient waveguiding has been observed in optical transmission measurements, with waveguide losses ranging from 1.5 dB/mm for a waveguide with three missing row of holes (W3) to 0.2 dB/mm for seven missing rows (W7). (C) 2004 American Vacuum Society.

Place, publisher, year, edition, pages
2004. Vol. 22, no 6, 3356-3358 p.
Keyword [en]
Crystals, Electron cyclotron resonance, Heterojunctions, Light propagation, Light transmission, Losses, Metallorganic vapor phase epitaxy, Molecular beam epitaxy, Photons, Polymethyl methacrylates, Reactive ion etching, Semiconducting aluminum compounds, Semiconducting gallium arsenide, Semiconducting indium phosphide
National Category
Atom and Molecular Physics and Optics
URN: urn:nbn:se:kth:diva-40347DOI: 10.1116/1.1824053ISI: 000226439800154ScopusID: 2-s2.0-13244288123OAI: diva2:441201
QC 20110915. 48th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication. San Diego, CA. JUN 01-04, 2004 Available from: 2011-09-15 Created: 2011-09-14 Last updated: 2011-10-18Bibliographically approved

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Anand, Srinivasan
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