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Device integration issues towards 10 nm MOSFETs
KTH, School of Information and Communication Technology (ICT), Microelectronics and Information Technology, IMIT.ORCID iD: 0000-0002-5845-3032
KTH, School of Information and Communication Technology (ICT), Microelectronics and Information Technology, IMIT.ORCID iD: 0000-0001-6459-749X
KTH, School of Information and Communication Technology (ICT), Microelectronics and Information Technology, IMIT.
KTH, School of Information and Communication Technology (ICT), Microelectronics and Information Technology, IMIT.
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2006 (English)In: 2006 25TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS, NEW YORK, NY: IEEE , 2006, 25-30 p.Conference paper, Published paper (Refereed)
Abstract [en]

An overview of critical integration issues for future generation MOSFETs towards 10 nm gate length is presented. Novel materials and innovative structures are discussed. Implementation of high K gate dielectrics is presented and device performance is demonstrated for TiN metal gate surface channel SiGe MOSFETs with a gate stack based on ALD-formed HfO(2)/Al(2)O(3). Low frequency noise properties for those devices are also analyzed. A selective SiGe epitaxy process for low resistivity source/drain contacts has been developed and implemented in pMOSFETs. A spacer pattering technology using optical lithography to fabricate sub 50 nm high-frequency MOSFETs and nanowires is demonstrated, Finally ultra thin body Sol devices with high mobility SiGe channels are demonstrated.

Place, publisher, year, edition, pages
NEW YORK, NY: IEEE , 2006. 25-30 p.
Series
International Conference on Microelectronics-MIEL, ISSN 2159-1660
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-42038DOI: 10.1109/ICMEL.2006.1650891ISI: 000238839700004Scopus ID: 2-s2.0-77956550566ISBN: 1-4244-0116-X (print)OAI: oai:DiVA.org:kth-42038DiVA: diva2:446438
Conference
25th International Conference on Microelectronics. Belgrade, SERBIA MONTENEG. MAY 14-17, 2006
Note
QC 20111007Available from: 2011-10-07 Created: 2011-10-05 Last updated: 2012-03-22Bibliographically approved

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Malm, B. GunnarHellstrom, Per-Erik

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Östling, MikaelMalm, B. Gunnarvon Haartman, MartinHållstedt, JuliusZhang, ZhenHellstrom, Per-ErikZhang, Shili
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