Finite element analysis of substrate effects on indentation behaviour of thin films
2004 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 447, 399-405 p.Article in journal (Refereed) Published
The substrate effects on indentation behaviour of thin films are analysed using finite element (FE) method. There is no universal critical penetration depth beyond which the substrate effects come in. The critical penetration depth is dependent on the combination of the film and the substrate and more sensitive to differences in the elastic properties than in the plastic properties of the film/substrate system. The FE simulation results of the effects of the substrate on the elastic modulus and the hardness of the film/substrate system have also been compared with the empirical models of Doerner and Bhattacharya, respectively.
Place, publisher, year, edition, pages
2004. Vol. 447, 399-405 p.
finite element method, indentation, thin films
IdentifiersURN: urn:nbn:se:kth:diva-43801DOI: 10.1016/S0040-6090(03)01071-XISI: 000188995700072ScopusID: 2-s2.0-1342344862OAI: oai:DiVA.org:kth-43801DiVA: diva2:448989
QC 201110192011-10-192011-10-182011-10-31Bibliographically approved