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Finite element analysis of substrate effects on indentation behaviour of thin films
KTH, Superseded Departments, Materials Science and Engineering.
KTH, Superseded Departments, Materials Science and Engineering.
2004 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 447, 399-405 p.Article in journal (Refereed) Published
Abstract [en]

The substrate effects on indentation behaviour of thin films are analysed using finite element (FE) method. There is no universal critical penetration depth beyond which the substrate effects come in. The critical penetration depth is dependent on the combination of the film and the substrate and more sensitive to differences in the elastic properties than in the plastic properties of the film/substrate system. The FE simulation results of the effects of the substrate on the elastic modulus and the hardness of the film/substrate system have also been compared with the empirical models of Doerner and Bhattacharya, respectively.

Place, publisher, year, edition, pages
2004. Vol. 447, 399-405 p.
Keyword [en]
finite element method, indentation, thin films
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:kth:diva-43801DOI: 10.1016/S0040-6090(03)01071-XISI: 000188995700072Scopus ID: 2-s2.0-1342344862OAI: oai:DiVA.org:kth-43801DiVA: diva2:448989
Note
QC 20111019Available from: 2011-10-19 Created: 2011-10-18 Last updated: 2017-12-08Bibliographically approved

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