Continuously tunable 1.55-mu m VCSEL implemented by precisely curved dielectric top DBR involving tailored stress
2004 (English)In: IEEE Photonics Technology Letters, ISSN 1041-1135, E-ISSN 1941-0174, Vol. 16, no 3, 720-722 p.Article in journal (Refereed) Published
We present an optically pumped and continuously tunable 1.55-mum vertical-cavity surface-emitting laser (VCSEL). The device shows. 26-mn spectral tuning range, 400-muW maximum output power, and 57-dBm side-mode suppression ratio. The VCSEL is implemented using a two-chip concept. The movable top mirror membrane is precisely designed to obtain a tailored air-gap length (L' = 16 mum) and a radius of curvature (ROC = 4.5 mm) in order to efficiently support the fundamental optical mode of the plane-concave resonator. It consists of a distributed Bragg reflector (DBR) with periodic, differently stressed silicon nitride and silicon dioxide multilayers implemented by plasma-enhanced chemical vapor deposition. The lower InP-based part, comprising the InP-InGaAsP bottom DBR and the active region, is grown monolithicaily using metal-organic vapor phase epitaxy.
Place, publisher, year, edition, pages
2004. Vol. 16, no 3, 720-722 p.
microelectromechanical devices, optical resonators, surface-emitting lasers, wavelength-division multiplexing
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-45368DOI: 10.1109/LPT.2004.823734ISI: 000220018500005ScopusID: 2-s2.0-1642587062OAI: oai:DiVA.org:kth-45368DiVA: diva2:452793
QC 201110312011-10-312011-10-282011-10-31Bibliographically approved