Change search
ReferencesLink to record
Permanent link

Direct link
In-situ observation of non-hemispherical tip shape formation during laser-assisted atom probe tomography
IMEC, Kapeldreef 75, B-3000 Leuven, Belgium.
IMEC, B-3000 Louvain; Univ Liege, Inst Montefiore .
IMEC, Kapeldreef 75, B-3000 Leuven, Belgium.
IMEC, Kapeldreef 75, B-3000 Leuven, Belgium.
Show others and affiliations
2011 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 109, no 10, 104909- p.Article in journal (Refereed) Published
Abstract [en]

It is shown by SEM imaging of the tip and by observing the emission pattern of the evaporated atoms that laser assisted evaporation in an atom probe can lead to nonhemispherical tip shapes and time-dependent nonuniform emission. We have investigated this nonuniformity by observing the change in field of view when using laser wavelengths of 515 nm and 343 nm on silicon. The change is monitored in situ by 0.5 nm thick silicon oxide. We demonstrate that the field of view can easily be changed by more than 10 nm and that the apparent oxide layer thickness can deviate substantially from its correct value. The dependence of the tip shape deformations and the reconstruction artifacts on the laser wavelength are explained through simulations of the laser-tip interaction and nonhomogeneous heating effects.

Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2011. Vol. 109, no 10, 104909- p.
Keyword [en]
deformation, elemental semiconductors, evaporation, laser beam applications, scanning electron microscopy, silicon, silicon compounds, tomography
National Category
Nano Technology
Research subject
URN: urn:nbn:se:kth:diva-46342DOI: 10.1063/1.3592339ISI: 000292115900154OAI: diva2:453794
QC 20111103Available from: 2011-11-03 Created: 2011-11-03 Last updated: 2011-12-14Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Innocenti, Nicolas
In the same journal
Journal of Applied Physics
Nano Technology

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 55 hits
ReferencesLink to record
Permanent link

Direct link