An apodized surface grating coupler enabling the fabrication of silicon photonic nanowire sensor circuits in one lithography step
2011 (English)In: Proceedings IEEE International Conference on Solid-State Sensors, Actuators,and Microsystems (Transducers), Beijing, China: IEEE , 2011, 1539-1541 p.Conference paper (Other academic)
We present the design, fabrication, and experimental characterization of a silicon surface grating coupler that enables the creation of complete photonic nanowire sensor circuits in a single lithography step on a standard SOI wafer. This advance is achieved without sacrifices in the coupling efficiency through the use of an apodization algorithm that tunes the width of each gap and bar in the grating. This design optimization provides a high light coupling efficiency and a low back reflection with a grating etched fully through the SOI device layer. We experimentally demonstrate a coupling efficiency of 35% on a standard SOI substrate at a wavelength of 1536 nm, and show that with an optimized buried oxide (BOX) thickness, a coupling efficiency of 72% could be achieved.
Place, publisher, year, edition, pages
Beijing, China: IEEE , 2011. 1539-1541 p.
Couplers, Couplings, Gratings, Optical fiber sensors, Optical fibers, Photonics, Silicon
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-47364DOI: 10.1109/TRANSDUCERS.2011.5969732ScopusID: 2-s2.0-80052114588ISBN: 978-1-4577-0157-3OAI: oai:DiVA.org:kth-47364DiVA: diva2:454866
International Conference on Solid-State Sensors, Actuators,and Microsystems
© 2011 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
QC 201111102011-11-102011-11-082011-11-10Bibliographically approved