Metallized and oxidized silicon macropore arrays filled with a scintillator for CCD-based X-ray imaging detectors
2004 (English)In: 2003 IEEE NUCLEAR SCIENCE SYMPOSIUM, CONFERENCE RECORD, VOLS 1-5, 2004, 1006-1010 p.Conference paper (Refereed)
Silicon Charge Coupled Devices (CCD) covered with a scintillating film are now available on the market for use in digital medical imaging. However, these devices could still be improved in terms of sensitivity and especially spatial resolution by coating the CCD with an array of scintillating waveguides. In this work-, we fabricated such waveguides by first etching pores in silicon, then performing metallization or oxidation of the pore walls and finally filling the pores with CsI(TI). The resulting structures were observed using SEM and tested under X-ray exposure. The detector performances were also compared with simulations, indicating that the optimal pore depth for metallized macropore arrays is about 80 mum while it is around 350 mum for oxidized ones. This result, together with the roughness of the metal coating, explains why lower performances were measured experimentally with the metallized macropores. Indeed, our macropore arrays had depths in the range of 210-390 mum, which is favorable to oxidized structures.
Place, publisher, year, edition, pages
2004. 1006-1010 p.
, IEEE NUCLEAR SCIENCE SYMPOSIUM - CONFERENCE RECORD, ISSN 1082-3654
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-47387ISI: 000223398000221OAI: oai:DiVA.org:kth-47387DiVA: diva2:455315
IEEE Nuclear Science Symposium/Medical Imaging Conference Location: Portland, OR Date: OCT 19-25, 2003
QC 201111092011-11-092011-11-082011-11-09Bibliographically approved