RF MEMS tuneable capacitors based on moveable sidewalls in 3D micromachined coplanar transmission lines
2010 (English)In: Microwave Conference Proceedings (APMC), 2010 Asia-Pacific, IEEE , 2010, 1821-1824 p.Conference paper (Refereed)
This paper reports for the first time on a novel concept of creating MEMS tuneable/switchable capacitors, by laterally moving of the sidewalls of a three-dimensional micromachined transmission line. Furthermore, the microelectromechanical actuators are completely embedded inside the ground layer of the transmission line. The devices are based on a single-photolithography SOI RF MEMS process developed by the authors. Three different prototype designs have been fabricated and characterized, and model parameters were extracted which very well fit the measurement results. The min/max capacitive values are 43/76, 55/80, and 64/80 fF. The measured insertion loss for the best design are -0.3 dB without transmission line and -1.38 dB including the transmission line (20 GHz). The transmission lines alone were found to be more lossy than expected (1.1 dB/mm), which is attributed to difficulties in the control of the side-wall metallization thickness of this first prototype run.
Place, publisher, year, edition, pages
IEEE , 2010. 1821-1824 p.
RF MEMS, tuneable capacitor, switched capacitor, micromachined transmission line
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-47441ScopusID: 2-s2.0-79955708968ISBN: 978-1-902339-22-2ISBN: 978-1-4244-7590-2OAI: oai:DiVA.org:kth-47441DiVA: diva2:455322
2010 Asia-Pacific Microwave Conference (APMC)
© 2010 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.2011-11-102011-11-092011-11-10Bibliographically approved