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MULTI-POSITION LARGE TUNING-RANGE DIGITALLY TUNEABLE CAPACITORS EMBEDDED IN 3D MICROMACHINED TRANSMISSION LINES
KTH, School of Electrical Engineering (EES), Microsystem Technology. (RF MEMS)ORCID iD: 0000-0002-8264-3231
KTH, School of Electrical Engineering (EES), Microsystem Technology. (RF MEMS)
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Microsystem Technology. (RF MEMS)
2011 (English)In: IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011, IEEE , 2011, 165-168 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports for the first time on multi-position RF MEMS digitally tuneable capacitors with large tuning range which are integrated inside a coplanar transmission line and whose tuning is achieved by moving the sidewalls of the 3D micromachined transmission line, with the actuators being completely embedded and shielded inside the ground layer. Devices with symmetrical two and three stage actuators have been fabricated in an SOI RF MEMS process. A tuning range of Cmax/Cmin=2.41 with a total of 7 discrete tuning steps from 44 to 106 fF was achieved for the three-stage tuneable capacitors. The symmetrical integration in the transmission line and a low parasitic inductance result in a high resonance frequency of 77 GHz. Devices with actuator designs of different mechanical stiffness, resulting in actuation voltages of 16 to 73 V, were fabricated and evaluated. The robustness of the actuator to high-power signals has been investigated by a nonlinear electromechanical model, which shows that self actuation occurs for high-stiffness designs (73 N/m) not below 50 dBm, and even very low-stiffness devices (9.5 N/m) do not self-actuate below 40 dBm.

Place, publisher, year, edition, pages
IEEE , 2011. 165-168 p.
Series
Proceedings: IEEE micro electro mechanical systems, ISSN 1084-6999
Keyword [en]
RF MEMS, tuneable capacitors, 3D transmission line
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-47442DOI: 10.1109/MEMSYS.2011.5734387ISI: 000295841200041Scopus ID: 2-s2.0-79953799015ISBN: 978-1-4244-9632-7 (print)OAI: oai:DiVA.org:kth-47442DiVA: diva2:455329
Note
© 2011 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.Available from: 2011-11-10 Created: 2011-11-09 Last updated: 2011-11-15Bibliographically approved

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Stemme, Göran

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