SMA Microvalves for Very Large Gas Flow Control Manufactured Using Wafer-Level Eutectic Bonding
2012 (English)In: IEEE transactions on industrial electronics (1982. Print), ISSN 0278-0046, Vol. 59, no 12, 4895-4906 p.Article in journal (Refereed) Published
This paper presents a novel gas microvalve design concept, in which a flow control gate is opened by a pneumatic pressure and closed by a shape memory alloy actuator, allowing large flow control. Two different design variations were fabricated using a novel wafer-level Au-Si eutectic bonding process for TiNi to silicon integration. The resulting microvalves demonstrate a record pneumatic performance per footprint area; a microvalve with a footprint of only 1 x 3.3 mm(2) successfully controls a flow difference of 3100 sccm at a pressure drop of 70 kPa using a power of 0.35 W.
Place, publisher, year, edition, pages
2012. Vol. 59, no 12, 4895-4906 p.
Eutectic bonding, Microvalve, Shape Memory Alloy, Wafer-scale integration
Engineering and Technology
IdentifiersURN: urn:nbn:se:kth:diva-47632DOI: 10.1109/TIE.2011.2173892ISI: 000306142000040ScopusID: 2-s2.0-84863768457OAI: oai:DiVA.org:kth-47632DiVA: diva2:455837
FunderEU, European Research Council, 267528
QC 201208062011-11-112011-11-112012-08-06Bibliographically approved