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MEMS tunable metamaterials surfaces and their applications
Department of Radio Science and Engineering, SMARAD Centre of Excellence, Aalto University.
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
Aalto University, Finland.
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2010 (English)In: APMC 2010: 2010 Asia-Pacific Microwave Conference proceedings : Dec. 7-10 Yokohama, Japan, 2010, 239-242 p.Conference paper (Refereed)
Abstract [en]

Microelectromechanical systems (MEMS) are proposed as a technological solution for fabrication of metamaterials. This enables tunability of metamaterials effective properties and allows using metamaterials in wide range of applications. Low loss of the MEMS devices allows the metamaterials application to be extended to millimeter and submillimeter wave frequencies without compromising on performance. Electronic beam steering by MEMS tunable metamaterials at millimeter wavelength is considered and a prototype of a W band analog tunable phase shifter is demonstrated. The insertion loss of the fabricated MEMS tunable metamaterials surface varies from 0.7 dB to a maximum of 3.5 dB (at a resonance frequency). MEMS varactors have shown reliable and repeatable analog operation over 108 cycles.

Place, publisher, year, edition, pages
2010. 239-242 p.
Keyword [en]
MEMS, beam steering, metamaterials, phase shifters
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
URN: urn:nbn:se:kth:diva-48385ScopusID: 2-s2.0-79955733029ISBN: 978-1-4244-7590-2ISBN: 978-1-902339-22-2OAI: diva2:457458
2010 Asia-Pacific Microwave Conference, APMC 2010; Yokohama; Japan; 7 December 2010 through 10 December 2010

QC 20111122

Available from: 2011-11-17 Created: 2011-11-17 Last updated: 2014-09-04Bibliographically approved

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Sterner, MikaelDudorov, SergeyOberhammer, Joachim
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