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Reliability investigation of stress-compensated metal-coated monocrystalline-silicon membranes for MEMS tuneable high-impedance surfaces
KTH, School of Electrical Engineering (EES), Microsystem Technology.
Department of Radio Science and Engineering, SMARAD Centre of Excellence, Aalto University.
Department of Radio Science and Engineering, SMARAD Centre of Excellence, Aalto University.
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0001-9552-4234
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2010 (English)Conference paper, Published paper (Other academic)
Place, publisher, year, edition, pages
2010.
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-48380OAI: oai:DiVA.org:kth-48380DiVA: diva2:457463
Conference
11th International Symposium on RF MEMS and RF Microsystems. Otranto, Italy. June 29 - July 1 2010
Note
QC 20111123. Oral presentation by Mikael SternerAvailable from: 2011-11-17 Created: 2011-11-17 Last updated: 2011-11-30Bibliographically approved

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Stemme, Göran

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Sterner, MikaelStemme, GöranOberhammer, Joachim
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CiteExportLink to record
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  • apa
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