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Depth profiling in alumina ceramic by optical coherence tomography
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics. (Metrology and Optics)ORCID iD: 0000-0003-0776-3716
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics. (Metrology and Optics)ORCID iD: 0000-0002-0105-4102
2010 (English)In: Proceedings of the 7th International Conference on Multi-Material Micro Manufacture / [ed] Bertrand Fillon, Chantal Khan-Malek, Stefan Dimov, Singapore: Research Publishing Services, 2010, , 323 p.316-319 p.Conference paper, Published paper (Refereed)
Abstract [en]

Quality inspection of multi layer ceramic micro devices is a challenging task for large-scale production. Detection of embedded cavities, metal strips or defects within a sintered multi layer alumina ceramic stack is one of the research areas under investigation in the EU-Multilayer project. Since visible light is highly scattered in the turbid alumina, traditional optical imaging techniques fails and acoustic microscopy requires the structure to be soaked in a liquid for good acoustic coupling. In this paper we investigate the performance of optical coherence tomography (OCT) as a candidate for inspection of alumina films. To understand how deep we can “see” through the alumina material, an optical scattering model is built up based on the study of microstructure of the sintered alumina sample. The investigated sample has high purity, more than 1% porosity and an average pore size of 0.8 µm. By applying optical coherence tomography (OCT) to a sintered tapered alumina ceramic sample for the first time, a depth profile of sample is obtained with high resolution. The maximum detectable thickness was is 0.26 mm using an OCT system with center wavelength at 1.3 µm and axial resolution of 12 µm.

Place, publisher, year, edition, pages
Singapore: Research Publishing Services, 2010. , 323 p.316-319 p.
Keyword [en]
Alumina, turbid media, optical coherence tomography (OCT), light scattering, inspection, metrology
National Category
Engineering and Technology
Research subject
SRA - Production
Identifiers
URN: urn:nbn:se:kth:diva-48443DOI: 10.3850/978-981-08-6555-9_187ISBN: 978-981-08-6555-9 (print)OAI: oai:DiVA.org:kth-48443DiVA: diva2:458055
Conference
4M 2010 Conference
Projects
FP-7 Multilayer project
Funder
EU, FP7, Seventh Framework Programme, FP7-NMP4-2007-214122XPRES - Initiative for excellence in production research
Note

Qc 20111216

Available from: 2012-01-11 Created: 2011-11-18 Last updated: 2014-04-28Bibliographically approved
In thesis
1. Assessment of optical coherence tomography for metrology applications in high-scattering ceramic materials
Open this publication in new window or tab >>Assessment of optical coherence tomography for metrology applications in high-scattering ceramic materials
2012 (English)Licentiate thesis, comprehensive summary (Other academic)
Abstract [en]

Large-scale and cost-effective manufacturing of ceramic micro devices based on tape stacking requires the development of inspection systems to perform high-resolution in-process quality control of embedded manufactured cavities, metal structures and defects.

In this work, alumina ceramic samples are evaluated by optical coherence tomography (OCT) operating at 1.3μm wavelength and some dimensional data are obtained by dedicated image processing and segmentation. Layer thicknesses can be measured and laser-machined channels can be verified embedded at around 100μm depth. Moreover, detection of internal defects is enabled.

Monte Carlo ray tracing simulations are employed to analyze the abilities of OCT in imaging of the embedded channels. The light scattering mechanism is studied for the alumina ceramics, and different scattering origins and models are discussed. The scattering parameters required as input data for simulations are evaluated from the integrating sphere measurements of collimated and diffuse transmittance spectra using a reconstruction algorithm based on refined diffusion approximation approach.

 

Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2012. vii, 61 p.
Series
Trita-IIP, ISSN 1650-1888 ; 2012:07
Keyword
metrology, optical coherence tomography, alumina ceramics, nondestructive testing, imaging through turbid media, light scattering, image processing, numerical approximation and analysis, Monte Carlo method
National Category
Engineering and Technology
Identifiers
urn:nbn:se:kth:diva-98621 (URN)978-91-7501-398-5 (ISBN)
Presentation
2012-06-08, Sal M311, KTH, Brinellvägen 68, Stockholm, 14:00 (English)
Opponent
Supervisors
Funder
XPRES - Initiative for excellence in production research
Note

QC 20120628

Available from: 2012-06-28 Created: 2012-06-28 Last updated: 2014-04-28Bibliographically approved

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Su, Rong

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