Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Optical coherence tomography: a potential tool for roughness assessment of free and embedded surfaces of laser-machined alumina ceramic
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics. (Metrology and Optics)ORCID iD: 0000-0003-0776-3716
Institute of Applied Physics RAS, Russia. (Laboratory of Biophotonics)
Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Poland. (Thickfilm Microsystems Laboratory)
Wrocław University of Technology, Faculty of Microsystems Electronics and Photonics, Poland. (Thickfilm Microsystems Laboratory)
Show others and affiliations
2011 (English)In: Proceedings of the 8th International Conference on Multi-Material Micro Manufacture / [ed] Heinz Kuck, Holger Reinecke and Stefan Dimov, Singapore: Research Publishing , 2011, 140-144 p.Conference paper, Published paper (Refereed)
Abstract [en]

For an emerging market a mass and cost-effective production of non-silicon micro devices requires an in-process and accurate 3D monitoring to assure the quality. Optical coherence tomography (OCT) providing high-resolution contactless imaging is used to inspect the surface quality of a laser-machined alumina ceramic layer. Quantitatively the root mean square (rms) roughness is measured by traditional means and provides input parameters to theMonte Carlosimulation of OCT method. We found that the quality of both free and embedded surfaces of the highly-scattering alumina ceramic material can be evaluated by OCT.

Place, publisher, year, edition, pages
Singapore: Research Publishing , 2011. 140-144 p.
Keyword [en]
Alumina ceramics, optical coherence tomography (OCT), light scattering, surface roughness, Monte Carlo method, laser machining
National Category
Engineering and Technology
Research subject
SRA - Production
Identifiers
URN: urn:nbn:se:kth:diva-48468DOI: 10.3850/978-981-07-0319-6_247ISI: 000307677000030ISBN: 978-981-07-0319-6 (print)OAI: oai:DiVA.org:kth-48468DiVA: diva2:458056
Conference
4M 2011 conference
Projects
Multilayer project (FP7-NMP4-2007-214122)
Funder
EU, FP7, Seventh Framework Programme, FP7-NMP4-2007-214122XPRES - Initiative for excellence in production research
Note

QC 20111221

Available from: 2011-12-21 Created: 2011-11-18 Last updated: 2014-04-28Bibliographically approved
In thesis
1. Assessment of optical coherence tomography for metrology applications in high-scattering ceramic materials
Open this publication in new window or tab >>Assessment of optical coherence tomography for metrology applications in high-scattering ceramic materials
2012 (English)Licentiate thesis, comprehensive summary (Other academic)
Abstract [en]

Large-scale and cost-effective manufacturing of ceramic micro devices based on tape stacking requires the development of inspection systems to perform high-resolution in-process quality control of embedded manufactured cavities, metal structures and defects.

In this work, alumina ceramic samples are evaluated by optical coherence tomography (OCT) operating at 1.3μm wavelength and some dimensional data are obtained by dedicated image processing and segmentation. Layer thicknesses can be measured and laser-machined channels can be verified embedded at around 100μm depth. Moreover, detection of internal defects is enabled.

Monte Carlo ray tracing simulations are employed to analyze the abilities of OCT in imaging of the embedded channels. The light scattering mechanism is studied for the alumina ceramics, and different scattering origins and models are discussed. The scattering parameters required as input data for simulations are evaluated from the integrating sphere measurements of collimated and diffuse transmittance spectra using a reconstruction algorithm based on refined diffusion approximation approach.

 

Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2012. vii, 61 p.
Series
Trita-IIP, ISSN 1650-1888 ; 2012:07
Keyword
metrology, optical coherence tomography, alumina ceramics, nondestructive testing, imaging through turbid media, light scattering, image processing, numerical approximation and analysis, Monte Carlo method
National Category
Engineering and Technology
Identifiers
urn:nbn:se:kth:diva-98621 (URN)978-91-7501-398-5 (ISBN)
Presentation
2012-06-08, Sal M311, KTH, Brinellvägen 68, Stockholm, 14:00 (English)
Opponent
Supervisors
Funder
XPRES - Initiative for excellence in production research
Note

QC 20120628

Available from: 2012-06-28 Created: 2012-06-28 Last updated: 2014-04-28Bibliographically approved
2. Improved inspection and micrometrology of embedded structures in multi-layered ceramics: Development of optical coherence tomographic methods and tools
Open this publication in new window or tab >>Improved inspection and micrometrology of embedded structures in multi-layered ceramics: Development of optical coherence tomographic methods and tools
2014 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Roll-to-roll manufacturing of micro components based on advanced printing, structuring and lamination of ceramic tapes is rapidly progressing. This large-scale and cost-effective manufacturing process of ceramic micro devices is however prone to hide defects within the visually opaque tape stacks. To achieve a sustainable manufacturing with zero defects in the future, there is an urgent need for reliable inspection systems. The systems to be developed have to perform high-resolution in-process quality control at high speed. Optical coherence tomography (OCT) is a promising technology for detailed in-depth inspection and metrology. Combined with infrared screening of larger areas it can solve the inspection demands in the roll-to-roll ceramic tape processes. In this thesis state-of-art commercial and laboratory OCT systems, operating at the central wavelength of 1.3 µm and 1.7 µm respectively, are evaluated for detecting microchannels, metal prints, defects and delaminations embedded in alumina and zirconia ceramic layers at hundreds of micrometers beneath surfaces.

The effect of surface roughness induced scattering and scattering by pores on the probing radiation, is analyzed by experimentally captured and theoretically simulated OCT images of the ceramic samples, while varying surface roughnesses and operating wavelengths. By extending the Monte Carlo simulations of the OCT response to the mid-infrared the optimal operating wavelength is found to be 4 µm for alumina and 2 µm for zirconia. At these wavelengths we predict a sufficient probing depth of about 1 mm and we demonstrate and discuss the effect of rough surfaces on the detectability of embedded boundaries.

For high-precision measurement a new and automated 3D image processing algorithm for analysis of volumetric OCT data is developed. We show its capability by measuring the geometric dimensions of embedded structures in ceramic layers, extracting features with irregular shapes and detecting geometric deformations. The method demonstrates its suitability for industrial applications by rapid inspection of manufactured samples with high accuracy and robustness.

The new inspection methods we demonstrate are finally analyzed in the context of measurement uncertainty, both in the axial and lateral cases, and reveal that scattering in the sample indeed affects the lateral measurement uncertainty. Two types of image artefacts are found to be present in OCT images due to multiple reflections between neighboring boundaries and inhomogeneity of refractive index. A wavefront aberration is found in the OCT system with a scanning scheme of two galvo mirrors, and it can be corrected using our image processing algorithm.

Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2014. xi, 134 p.
Series
TRITA-IIP, ISSN 1650-1888 ; 14:01
Keyword
Metrology, Optical Coherence Tomography, Ceramics, Embedded Structure, Multilayer, Nondestructive Testing, Optical Inspection, Critical Dimension Measurement, Infrared Imaging, Scattering, Mie Calculation, Image Processing, Monte Carlo Simulation, 测量学, 光学相干断层扫描术,陶瓷,嵌入式结构,多层,无损检测,光学检测,关键尺寸测量,红外成像,散射,Mie计算,图像处理,Monte Carlo模拟
National Category
Engineering and Technology
Research subject
SRA - Production
Identifiers
urn:nbn:se:kth:diva-144595 (URN)978-91-7595-090-7 (ISBN)
Public defence
2014-05-16, Brinellsalen, M311, Brinellvägen 68, KTH, Stockholm, 10:00 (English)
Opponent
Supervisors
Projects
Multilayer (FP7-NMP4-2007-214122)
Funder
XPRES - Initiative for excellence in production researchEU, FP7, Seventh Framework Programme, FP7-NMP4-2007-214122
Note

QC 20140428

Available from: 2014-04-28 Created: 2014-04-25 Last updated: 2015-01-16Bibliographically approved

Open Access in DiVA

paper_4M conference 2011(407 kB)386 downloads
File information
File name FULLTEXT01.pdfFile size 407 kBChecksum SHA-512
cd1be4a0f4a9da75c803be51ff017ae6ee9057ee034d97e6d0c954699395356042f0f0b68feb996874808796e4ec78ea904e5783b9258ca94cadd988d2290500
Type fulltextMimetype application/pdf

Other links

Publisher's full textConference website

Authority records BETA

Su, Rong

Search in DiVA

By author/editor
Su, RongMattsson, Lars
By organisation
Metrology and Optics
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
Total: 386 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
isbn
urn-nbn

Altmetric score

doi
isbn
urn-nbn
Total: 217 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf