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The integration of mono-crystalline silicon micro-mirrors on CMOS for SLM applications
KTH, School of Electrical Engineering (EES), Microsystem Technology.
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0002-0525-8647
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2008 (English)In: International Conference on Multi-Material Micro Manufacture, 2008, 35-38 p.Conference paper, Published paper (Other academic)
Place, publisher, year, edition, pages
2008. 35-38 p.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:kth:diva-48962OAI: oai:DiVA.org:kth-48962DiVA: diva2:459082
Conference
International Conference on Multi-Material Micro Manufacture. Cardiff, UK. 9 September 2008 - 11 September 2008
Note
QC 20111128Available from: 2011-11-24 Created: 2011-11-24 Last updated: 2011-11-28Bibliographically approved

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Niklaus, Frank

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