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Measuring interface electrostatic potential and surface charge in a scanning electron microscope
National Institute for Materials Science.ORCID iD: 0000-0003-2562-0540
National Institute for Materials Science.
National Institute for Materials Science.
2009 (English)In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 27, no 6, 2357-2360 p.Article in journal (Refereed) Published
Abstract [en]

A novel method for electrostatic potential measurements at the interface is described. It involves placing a two-dimensional grid below the sample and observing it in a scanning electron microscope. Primary electron beam displacement, caused by surface charges, can be then measured for every grid knot. Using geometric parameters of the setup, a quantitative mapping of the potential can be extracted. It is shown that this method can achieve a tens of millivolt sensitivity and a submicron spatial resolution in electrostatic potential measurements.

Place, publisher, year, edition, pages
AVS Publications , 2009. Vol. 27, no 6, 2357-2360 p.
Keyword [en]
scanning electron microscopy, surface charging
National Category
Accelerator Physics and Instrumentation
Identifiers
URN: urn:nbn:se:kth:diva-48994DOI: 10.1116/1.3253475ISI: 000272803400012OAI: oai:DiVA.org:kth-48994DiVA: diva2:459110
Note
QC 20111129Available from: 2012-01-23 Created: 2011-11-24 Last updated: 2017-12-08Bibliographically approved

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Sychugov, Ilya

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