Measuring interface electrostatic potential and surface charge in a scanning electron microscope
2009 (English)In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 27, no 6, 2357-2360 p.Article in journal (Refereed) Published
A novel method for electrostatic potential measurements at the interface is described. It involves placing a two-dimensional grid below the sample and observing it in a scanning electron microscope. Primary electron beam displacement, caused by surface charges, can be then measured for every grid knot. Using geometric parameters of the setup, a quantitative mapping of the potential can be extracted. It is shown that this method can achieve a tens of millivolt sensitivity and a submicron spatial resolution in electrostatic potential measurements.
Place, publisher, year, edition, pages
AVS Publications , 2009. Vol. 27, no 6, 2357-2360 p.
scanning electron microscopy, surface charging
Accelerator Physics and Instrumentation
IdentifiersURN: urn:nbn:se:kth:diva-48994DOI: 10.1116/1.3253475ISI: 000272803400012OAI: oai:DiVA.org:kth-48994DiVA: diva2:459110
QC 201111292012-01-232011-11-242012-01-23Bibliographically approved