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Composition Control of Electron Beam Induced Nanodeposits by Surface Pretreatment and Beam Focusing
National Institute for Materials Science.ORCID iD: 0000-0003-2562-0540
National Institute for Materials Science.
National Institute for Materials Science.
2009 (English)In: The Journal of Physical Chemistry C, ISSN 1932-7447, E-ISSN 1932-7455, Vol. 113, no 52, 21516-21519 p.Article in journal (Refereed) Published
Abstract [en]

Cross-sectional transmission electron microscopy with elemental analysis was used to investigate shape and composition of nanostructures fabricated by electron beam induced deposition. The nanostructures were deposited on a thin edge of the silicon membrane allowing characterization without intermediate distorting preparation steps, such as focused ion beam milling. The effect of the surface carbon contaminants and the electron beam focusing on nanostructure composition was studied. It is shown how carbon content of nanostructures can be reduced by sample preheating, forming metal nanostructures with higher purity advantageous for circuitry and lithography applications.

Place, publisher, year, edition, pages
American Chemical Society (ACS), 2009. Vol. 113, no 52, 21516-21519 p.
National Category
Physical Chemistry
URN: urn:nbn:se:kth:diva-48997DOI: 10.1021/jp9079684ISI: 000272936400009OAI: diva2:459111
QC 20111129Available from: 2012-01-23 Created: 2011-11-24 Last updated: 2012-01-23Bibliographically approved

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Sychugov, Ilya
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