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RELIABLE BATCH MANUFACTURING OF MINIATURIZED VERTICAL VIAS IN SOFT POLYMER REPLICA MOLDING
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0002-0441-6893
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-8248-6670
2007 (English)In: 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2007), 2007, 527-529 p.Conference paper, Published paper (Refereed)
Abstract [en]

We introduce and have successfully tested an uncomplicated polydimethylsiloxane (PDMS) compatible method for batch manufacturing vertical microfluidic interconnects via a surface inhibition of cationic photopolymerization. The yield of the maskless method is 100%. Moreover, the method enhances bond strength with subsequently laminated polymer layers.

Place, publisher, year, edition, pages
2007. 527-529 p.
Keyword [en]
pdms, interconnects, photopolymerization, inhibition
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering Polymer Technologies
Identifiers
URN: urn:nbn:se:kth:diva-49442OAI: oai:DiVA.org:kth-49442DiVA: diva2:459651
Conference
11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2007), Paris, France, 7-11 Oct, 2007
Note

QC 20111130

Available from: 2011-11-27 Created: 2011-11-27 Last updated: 2015-06-18Bibliographically approved

Open Access in DiVA

fulltext(1387 kB)63 downloads
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File name FULLTEXT01.pdfFile size 1387 kBChecksum SHA-512
3932232861084f923ce7ecf32c26bd75e4b15371d87e4e5d0e5518604edd3a6b88bbf8866060d9e4897d4a3bc8ea9aa6749f38cbefe4e9c2c958ee4f528ecf30
Type fulltextMimetype application/pdf

Other links

http://wikisites.mcgill.ca/djgroup/images/5/5b/2007_microTAS--Carlborg_Stemme--vertical_vias_soft_polymers.pdfConference website

Authority records BETA

Haraldsson, TommyStemme, GöranWijngaart, Wouter van der

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Carlborg, Carl FredrikHaraldsson, TommyStemme, GöranWijngaart, Wouter van der
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Other Electrical Engineering, Electronic Engineering, Information EngineeringPolymer Technologies

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CiteExportLink to record
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