RELIABLE BATCH MANUFACTURING OF MINIATURIZED VERTICAL VIAS IN SOFT POLYMER REPLICA MOLDING
2007 (English)In: 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2007), 2007, 527-529 p.Conference paper (Refereed)
We introduce and have successfully tested an uncomplicated polydimethylsiloxane (PDMS) compatible method for batch manufacturing vertical microfluidic interconnects via a surface inhibition of cationic photopolymerization. The yield of the maskless method is 100%. Moreover, the method enhances bond strength with subsequently laminated polymer layers.
Place, publisher, year, edition, pages
2007. 527-529 p.
pdms, interconnects, photopolymerization, inhibition
Other Electrical Engineering, Electronic Engineering, Information Engineering Polymer Technologies
IdentifiersURN: urn:nbn:se:kth:diva-49442OAI: oai:DiVA.org:kth-49442DiVA: diva2:459651
11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2007), Paris, France, 7-11 Oct, 2007
QC 201111302011-11-272011-11-272015-06-18Bibliographically approved