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LOW TEMPERATURE “CLICK” WAFER BONDING OF OFF-STOICHIOMETRY THIOL-ENE (OSTE) POLYMERS TO SILICON
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0002-0441-6893
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-8248-6670
2011 (English)In: 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2011), 2011, 1143-1145 p.Conference paper, Published paper (Refereed)
Abstract [en]

We present a low temperature (< 37°C) wafer-scale microfluidic batch packaging process using covalent, dry bonding of offstoichiometry thiol-ene polymers (OSTE), enabling rapid, bio-compatible integration of fluidics on wafer-scale in combination with excellent polymer properties.

Place, publisher, year, edition, pages
2011. 1143-1145 p.
Keyword [en]
Biocompatible, Off-stoichiometry thiol-ene (OSTE), Packaging, Wafer-scale bonding
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering Polymer Technologies
Identifiers
URN: urn:nbn:se:kth:diva-49436Scopus ID: 2-s2.0-84883797908ISBN: 978-161839595-5 (print)OAI: oai:DiVA.org:kth-49436DiVA: diva2:459658
Conference
15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2011), Seattle, Washington, USA, 2-6 Oct, 2011
Note

QC 20111130

Available from: 2011-11-27 Created: 2011-11-27 Last updated: 2015-06-18Bibliographically approved

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fulltext(749 kB)87 downloads
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e31a3de924f1d2a623d4c6699ea6016d74bb479f5d7c4c63db6ca12867bc5939792927b1b548eec6f10a4bacbcf07a1645c5e3f238974eed46ac6f73f1a71235
Type fulltextMimetype application/pdf

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Scopushttp://www.rsc.org/images/LOC/2011/PDFs/Papers/383_0144.pdf

Authority records BETA

Haraldsson, TommyWijngaart, Wouter van der

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Carlborg, Carl FredrikSaharil, FarizahHaraldsson, TommyWijngaart, Wouter van der
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CiteExportLink to record
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