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InP lateral overgrowth technology for silicon photonics
KTH, School of Information and Communication Technology (ICT), Centres, Zhejiang-KTH Joint Research Center of Photonics, JORCEP.
KTH, School of Information and Communication Technology (ICT), Material Physics (Closed 20120101), Semiconductor Materials, HMA (Closed 20120101).
KTH, School of Information and Communication Technology (ICT), Material Physics (Closed 20120101), Semiconductor Materials, HMA (Closed 20120101).
KTH, School of Information and Communication Technology (ICT), Material Physics (Closed 20120101), Semiconductor Materials, HMA (Closed 20120101).
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2010 (English)In: 2010 Asia Communications and Photonics Conference and Exhibition, ACP 2010, Optical Society of America, 2010, 377-378 p.Conference paper, Published paper (Refereed)
Abstract [en]

Epitaxial Lateral Overgrowth has been proposed as a key technology of a novel hybrid integration platform for active silicon photonic components. By optimizing the process, a dislocation free InP layer has been successfully grown on top of silicon wafer, which can be used as the base for active devices.

Place, publisher, year, edition, pages
Optical Society of America, 2010. 377-378 p.
Keyword [en]
epitaxial lateral overgrowth, silicon photonics, integrated optics materials, semiconducting III-V materials, hydride vapour phase epitaxy
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-49558DOI: 10.1109/ACP.2010.5682513ISI: 000292740900005Scopus ID: 2-s2.0-84897664129ISBN: 978-142447111-9 (print)OAI: oai:DiVA.org:kth-49558DiVA: diva2:459845
Conference
Asia Communications and Photonics Conference and Exhibition, ACP 2010; Shanghai; 8 December 2010 through 12 December 2010
Funder
ICT - The Next Generation
Note

QC 20111128

Available from: 2011-11-28 Created: 2011-11-28 Last updated: 2014-10-09Bibliographically approved

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Lourdudoss, SebastianWosinski, Lech

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Wang, ZhechaoJunesand, CarlMetaferia, WondwosenHu, ChenLourdudoss, SebastianWosinski, Lech
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Zhejiang-KTH Joint Research Center of Photonics, JORCEPSemiconductor Materials, HMA (Closed 20120101)Photonics (Closed 20120101)
Electrical Engineering, Electronic Engineering, Information Engineering

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