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An investigation into Plasma Vapor Deposition Aided Chemical Vapor Deposition: A PVD aided CVD process for depositing Nitrogenatoms mixed in Carbon Diamond-Like-Structure is investigated and one such layer is formed with this method
KTH, School of Industrial Engineering and Management (ITM), Production Engineering.
2010 (English)Independent thesis Advanced level (degree of Master (Two Years)), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

The work presented in this master thesis includes experiments and analysis of the Physical Vapor Deposition aided Chemical Vapor deposition. Physical Vapor Deposition is usually deemed as a process of applying plasma phenomenon in highvacuum situation, knocking off the cathode material like particles or atoms, and depositing the knocked off particles onto a substrate surface.  Chemical Vapor Deposition process is usually referred to as a process of vaporizing liquid materials into the process chamber and reacting with other substances and forming solid particles. This kind of particles can be deposited onto a substrate surface and forming a coating layer. The by-productsare usually removed with the gas flow in the chamber. In order to assist the chemical reaction process, high temperature on the substrate is usually utilized. It is common knowledge to notice that under high temperature, the crystallographic structure of the substrate might change and result in negative damages. A combined method of using PVD phenomenon to assist the CVD process has been studied in this work and it shows a new trend in the method of coating process. As a result, a layer of nitrogen atoms mixed in Carbon Diamond-Like-Structures has been formedon the substrate surface.

Place, publisher, year, edition, pages
2010. , 52 p.
Series
Degree Project in Production Engineering Management, Second Level, 421
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:kth:diva-50056OAI: oai:DiVA.org:kth-50056DiVA: diva2:460957
Subject / course
Production Engineering
Educational program
Master of Science - Production Engineering and Management
Uppsok
Technology
Supervisors
Examiners
Available from: 2011-12-08 Created: 2011-12-01 Last updated: 2011-12-08Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
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