Error Propagation in Contact Resistivity Extraction Using Cross-Bridge Kelvin Resistors
2012 (English)In: IEEE Transactions on Electron Devices, ISSN 0018-9383, Vol. 59, no 6, 1585-1591 p.Article in journal (Refereed) Published
The cross-bridge Kelvin resistor is a commonly used method for measuring contact resistivity (rho(c)). For low rho(c), the measurement has to be corrected for systematic error using measurements of contact resistance, semiconductor sheet resistance, and device dimensions. However, it is not straightforward to estimate the propagation of random measurement error in the measured quantities on the extracted rho(c). In this paper, a method is presented to quantify the effect of random measurement error on the accuracy of rho(c) extraction. This is accomplished by generalized error propagation curves that show the error in rho(c) caused by random measurement errors. Analysis shows that when the intrinsic resistance of the contact is smaller than the semiconductor sheet resistance, it becomes important to consider random error propagation. Comparison of literature data, where rho(c) < 5.10(-8) Omega.cm(2) has been reported, shows that care should be taken since, even assuming precise electrical data, a 1% error in the measurement of device dimensions can lead to up to similar to 50% error in the estimation of rho(c).
Place, publisher, year, edition, pages
2012. Vol. 59, no 6, 1585-1591 p.
Contact resistance, contact resistivity, cross-bridge Kelvin resistor (CBKR), cross Kelvin resistor (CKR)
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-50123DOI: 10.1109/TED.2012.2189216ISI: 000304243600003ScopusID: 2-s2.0-84861344938OAI: oai:DiVA.org:kth-50123DiVA: diva2:461075
FunderSwedish Research CouncilEU, European Research Council, 228229StandUp
QC 20120619. Updated from manuscript to article in journal.2011-12-022011-12-022013-04-16Bibliographically approved