Metod och apparat för alstring av röntgenstrålning: Method And Apparatus For Generating X-Ray Radiation
2000 (Swedish)Patent (Other (popular science, discussion, etc.))
In a method and an apparatus for generating X-ray or EUV radiation, an electron beam is brought to interact with a propagating target jet, typically in a vacuum chamber. The target jet is formed by urging a liquid substance under pressure through an outlet opening. Hard X-ray radiation may be generated by converting the electron-beam energy to Bremsstrahlung and characteristic line emission, essentially without heating the jet to a plasma-forming temperature. Soft X-ray or EUV radiation may be generated by the electron beam heating the jet to a plasma-forming temperature.
Place, publisher, year, edition, pages
IdentifiersURN: urn:nbn:se:kth:diva-51131OAI: oai:DiVA.org:kth-51131DiVA: diva2:463480
CN 1272989 (2006-08-30)
EP 1305984-B1 (2010-11-24); JP 5073146-B2 (2012-11-14)2011-12-092011-12-092013-08-06Bibliographically approved