Miniaturized pressure sensor
2001 (English)Patent (Other (popular science, discussion, etc.))
An entirely surface micromachined free hanging strain-gauge pressure sensor is disclosed. The sensing element consists of a 80 mum long H-shaped double ended supported force transducing beam ( 16 ). The beam is located beneath and at one end attached to a square polysilicon diaphragm ( 14 ) and at the other end to the cavity edge. The sensor according to the invention enables a combination of high pressure sensitivity and miniature chip size as well as good environmental isolation. The pressure sensitivity for the sensor with a H-shaped force transducing beam, 0.4 mum thick was found to be 5 muV/V/mmHg.
Place, publisher, year, edition, pages
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-51350OAI: oai:DiVA.org:kth-51350DiVA: diva2:463944
US 7017420-B2 (2006-03-28)
QC 20111212. QC 201308072011-12-122011-12-122013-08-07Bibliographically approved