A robust micro conveyer realized by arrayed polyimide joint actuators
1999 (English)In: Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, 1999, 576-581 p.Conference paper (Refereed)
A new micromotion system (micro-conveyer) based on arrays of movable robustsilicon legs has been developed and investigated. The motion is achieved by thermal actuation of polyimide joint actuators using electrical heating. Successful experiments on moving flat objects in the millimeter range with high load capacity have been performed. The conveyerconsists of a15×5 mm2 chip with 12 silicon legs each 500 μm long. The maximum load conveyed on the structure was 2000 mg. Conveyance velocities up to 12 mm/s have been measured. Accelerated life-time measurements demonstrate the long-term stability of the actuators. The function of the polyimide joint actuators is unaffected after more than 2×108 load cycles.
Place, publisher, year, edition, pages
1999. 576-581 p.
Electric heating, Microelectromechanical devices, Polyimides, Robustness (control systems), Semiconducting silicon, Microconveyers, Polyimide joint actuators
Engineering and Technology
IdentifiersURN: urn:nbn:se:kth:diva-52897DOI: 10.1109/MEMSYS.1999.746892ISBN: 0-7803-5194-0OAI: oai:DiVA.org:kth-52897DiVA: diva2:468159
Twelfth IEEE International Conference on Micro Electro Mechanical Systems, 1999. MEMS '99, Orlando, FL, USA, 17 January 1999 through 21 January 1999
QC 201112202011-12-202011-12-202011-12-20Bibliographically approved