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Plasma Dynamics in an Unipolar Pulsed Magnetron Sputtering Discharge
KTH, Superseded Departments, Solid Mechanics.ORCID iD: 0000-0002-8153-3209
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-9008-8402
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2004 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
Bunratty, Ireland, 2004.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-53087OAI: oai:DiVA.org:kth-53087DiVA: diva2:468886
Conference
57th Gaseous Electronics Conference, September 26-29, 2004, Shannon, The Republic of Ireland
Note

Poster presentation. QC 20120124

Available from: 2011-12-21 Created: 2011-12-21 Last updated: 2017-04-06Bibliographically approved

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Gylfason, Kristinn B.

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Gudmundsson, J. T.Gylfason, Kristinn B.
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