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Compact MEMS reconfigurable ultra-wideband 10-18 GHz directional couplers
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201). (RF MEMS)ORCID iD: 0000-0002-8264-3231
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201). (RF MEMS)
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201). (RF MEMS)
2012 (English)In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), IEEE , 2012, 684-687 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports on area-efficient, ultra-wideband, MEMS-reconfigurable directional couplers, whose coupling is tuned by mechanically changing the geometry of 3D-micromachined coupled transmission lines, utilizing integrated MEMS electrostatic actuators. Devices have been fabricated in an SOI RF MEMS process. Furthermore, to the best knowledge of the authors, we report for the first time on couplers which are reconfigured by changing the geometry of the ground-plane coupling, either alone or including the conventional tuning of the direct coupling between the signal lines. This results in a very uniform and well predictable performance over a very large frequency band as proven in this paper. Two different concepts are presented and compared, along with measured RF performance and actuator characterization of fabricated devices.

Place, publisher, year, edition, pages
IEEE , 2012. 684-687 p.
Series
International Conference on Micro Electro Mechanical Systems, ISSN 1084-6999
Keyword [en]
Directional couplers, Electrostatic actuators, Frequency bands, Ultra-wideband (UWB)
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-53222DOI: 10.1109/MEMSYS.2012.6170279ISI: 000312912800172Scopus ID: 2-s2.0-84860444858ISBN: 978-146730324-8 (print)OAI: oai:DiVA.org:kth-53222DiVA: diva2:469404
Conference
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012;Paris;29 January 2012 through 2 February 2012
Note

QC 20120621

Available from: 2012-02-29 Created: 2011-12-23 Last updated: 2013-02-01Bibliographically approved

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Shah, UmerSterner, MikaelOberhammer, Joachim
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CiteExportLink to record
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