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Wafer-Level Heterogeneous Integration Techniques for MEMS and IC
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0001-9552-4234
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0002-0525-8647
2011 (English)Conference paper, Published paper (Other academic)
Place, publisher, year, edition, pages
2011. 159-174 p.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:kth:diva-59779OAI: oai:DiVA.org:kth-59779DiVA: diva2:476271
Conference
1st International Symposium on Integrated Microsystems (ISIM2011). Tsukuba Japan. 10th Feb. 2011
Note
QC 20120112. Invited talkAvailable from: 2012-01-11 Created: 2012-01-11 Last updated: 2012-01-12Bibliographically approved

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Stemme, GöranNiklaus, Frank

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CiteExportLink to record
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  • apa
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