Fully etched grating couplers for atomic layer deposited horizontal slot waveguides
2011 (English)In: 2011 12th International Conference on Ultimate Integration on Silicon, ULIS 2011, 2011, 126-129 p.Conference paper (Refereed)
Compact broadband grating couplers are designed and studied utilizing Atomic Layer Deposited Horizontal Slot waveguides, with four well-known material layers as the slot. Fabrication process conditions are experimentally studied to obtain more optimized designs. With the precision of the film thickness and refractive index provided by ALD, fabrication of reproducible grating couplers is feasible. An overview of design guidelines regarding the slot size and slot material is provided by 2D Finite Element Method calculations.
Place, publisher, year, edition, pages
2011. 126-129 p.
atomic layer deposition, finite element analysis, waveguide couplers, 2D finite element method calculations, ALD, atomic layer deposited horizontal slot waveguides, compact broadband grating couplers, fabrication process, fully etched grating couplers, slot material
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-61147DOI: 10.1109/ULIS.2011.5758007ScopusID: 2-s2.0-79957991210ISBN: 978-145770090-3OAI: oai:DiVA.org:kth-61147DiVA: diva2:478624
2011 12th International Conference on Ultimate Integration on Silicon, ULIS 2011; Cork; 14 March 2011 through 16 March 2011
FunderEU, European Research Council
QC 201201242012-01-162012-01-162014-11-14Bibliographically approved