Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Fully etched grating couplers for atomic layer deposited horizontal slot waveguides
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits. (EKT)
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits. (EKT)ORCID iD: 0000-0001-6459-749X
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits. (EKT)ORCID iD: 0000-0002-5845-3032
2011 (English)In: 2011 12th International Conference on Ultimate Integration on Silicon, ULIS 2011, 2011, 126-129 p.Conference paper, Published paper (Refereed)
Abstract [en]

Compact broadband grating couplers are designed and studied utilizing Atomic Layer Deposited Horizontal Slot waveguides, with four well-known material layers as the slot. Fabrication process conditions are experimentally studied to obtain more optimized designs. With the precision of the film thickness and refractive index provided by ALD, fabrication of reproducible grating couplers is feasible. An overview of design guidelines regarding the slot size and slot material is provided by 2D Finite Element Method calculations.

Place, publisher, year, edition, pages
2011. 126-129 p.
Keyword [en]
atomic layer deposition, finite element analysis, waveguide couplers, 2D finite element method calculations, ALD, atomic layer deposited horizontal slot waveguides, compact broadband grating couplers, fabrication process, fully etched grating couplers, slot material
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-61147DOI: 10.1109/ULIS.2011.5758007Scopus ID: 2-s2.0-79957991210ISBN: 978-145770090-3 (print)OAI: oai:DiVA.org:kth-61147DiVA: diva2:478624
Conference
2011 12th International Conference on Ultimate Integration on Silicon, ULIS 2011; Cork; 14 March 2011 through 16 March 2011
Funder
EU, European Research Council
Note
QC 20120124Available from: 2012-01-16 Created: 2012-01-16 Last updated: 2014-11-14Bibliographically approved
In thesis
1. Horizontal Slot Waveguides for Silicon Photonics Back-End Integration
Open this publication in new window or tab >>Horizontal Slot Waveguides for Silicon Photonics Back-End Integration
2014 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

This thesis presents the development of integrated silicon photonic devices. These devices are compatible with the present and near future CMOS technology. High-khorizontal grating couplers and waveguides are proposed. This work consists of simulations and device design, as well as the layout for the fabrication process, device fabrication, process development, characterization instrument development and electro-optical characterizations.

The work demonstrates an alternative solution to costly silicon-on-insulator photonics. The proposed solution uses bulk silicon wafers and thin film deposited waveguides. Back-end deposited horizontal slot grating couplers and waveguides are realized by multi-layers of amorphous silicon and high-k materials.

The achievements of this work include: A theoretical study of fully etched slot grating couplers with Al2O3, HfO2 and AIN, an optical study of the high-k films with spectroscopic ellipsometry, an experimental demonstration of fully etched SiO2 single slot grating couplers and double slot Al2O3 grating couplers, a practical demonstration of horizontal double slot high-k waveguides, partially etched Al2O3 single slot grating couplers, a study of a scheme for integration of the double slot Al2O3  waveguides with selectively grown germanium PIN photodetectors, realization of test chips for the integrated germanium photodetectors, and study of integration with graphene photodetectors through embedding the graphene into a high-k slot layer.

From an application point of view, these high-k slot waveguides add more functionality to the current silicon photonics. The presented devices can be used for low cost photonics applications. Also alternative optical materials can be used in the context of this photonics platform.

With the robust design, the grating couplers result in improved yield and a more cost effective solution is realized for integration of the waveguides with the germanium and graphene photodetectors.

 

 

 

 

Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2014. xiii, 90 p.
Series
TRITA-ICT/MAP AVH, ISSN 1653-7610 ; 2014:17
Keyword
silicon photonics, slot waveguides, grating couplers, CMOS tech- nology, high-k, ALD, germanium photodetectors, graphene photodetectors, pho- tonic integrated circuits
National Category
Nano Technology Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-155732 (URN)978-91-7595-340-3 (ISBN)
Public defence
2014-12-05, Sal/hall A, Electrum, KTH-ICT, Kista, 10:00 (English)
Opponent
Supervisors
Note

QC 20141114

Available from: 2014-11-14 Created: 2014-11-11 Last updated: 2016-12-01Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full textScopus

Authority records BETA

Malm, Gunnar

Search in DiVA

By author/editor
Naiini, MaziarMalm, GunnarÖstling, Mikael
By organisation
Integrated Devices and Circuits
Other Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar

doi
isbn
urn-nbn

Altmetric score

doi
isbn
urn-nbn
Total: 63 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf