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Partially coherent image computation using elementary functions
National University of Irelend, Galway. (Applied Optics)
KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics. (Applied Optics)ORCID iD: 0000-0003-3804-0561
National University of Ireland, Galway. (Applied Optics)
2009 (English)In: Optical Microlithography XXII / [ed] Harry J. Levinson; Mircea V. Dusa, SPIE - International Society for Optical Engineering, 2009Conference paper, Published paper (Other academic)
Abstract [en]

It is well-known that calculations of the propagation of partially coherent light, such as those required for the calculation of two-dimensional image intensities, involve four-dimensional functions. Recently, Wald et al [Proc SPIE, 59621G, 2005] outlined a method for reducing the four-dimensional problem to a purely twodimensional one. Instead of an exact modal expansion of the mutual coherence function or cross-spectral density, an approximate expansion is used, into what we call elementary functions. In this paper, rules of thumb are developed for fast and efficient computation of the image intensity in a simple partially coherent lithographic imaging system.

Place, publisher, year, edition, pages
SPIE - International Society for Optical Engineering, 2009.
Series
Proceedings of SPIE, ISSN 0277-786X ; 7274
Keyword [en]
partial coherence, optical propagation, information content
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:kth:diva-62339DOI: 10.1117/12.814072Scopus ID: 2-s2.0-65849289152ISBN: 9780819475275 (print)OAI: oai:DiVA.org:kth-62339DiVA: diva2:480166
Conference
Optical Microlithography XXII. San Jose, CA. 24 February 2009 - 27 February 2009
Note

QC 20120120

Available from: 2012-01-19 Created: 2012-01-19 Last updated: 2017-03-29Bibliographically approved

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Burvall, Anna

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