Partially coherent image computation using elementary functions
2009 (English)In: Optical Microlithography XXII / [ed] Harry J. Levinson; Mircea V. Dusa, SPIE - International Society for Optical Engineering, 2009Conference paper (Other academic)
It is well-known that calculations of the propagation of partially coherent light, such as those required for the calculation of two-dimensional image intensities, involve four-dimensional functions. Recently, Wald et al [Proc SPIE, 59621G, 2005] outlined a method for reducing the four-dimensional problem to a purely twodimensional one. Instead of an exact modal expansion of the mutual coherence function or cross-spectral density, an approximate expansion is used, into what we call elementary functions. In this paper, rules of thumb are developed for fast and efficient computation of the image intensity in a simple partially coherent lithographic imaging system.
Place, publisher, year, edition, pages
SPIE - International Society for Optical Engineering, 2009.
, Proceedings of SPIE, ISSN 0277786X ; 7274
partial coherence, optical propagation, information content
Atom and Molecular Physics and Optics
IdentifiersURN: urn:nbn:se:kth:diva-62339DOI: 10.1117/12.814072ScopusID: 2-s2.0-65849289152ISBN: 978-081947527-5OAI: oai:DiVA.org:kth-62339DiVA: diva2:480166
Optical Microlithography XXII. San Jose, CA. 24 February 2009 - 27 February 2009
QC 201201202012-01-192012-01-192016-05-23Bibliographically approved