Partial spatial coherence in an excimer-laser lithographic imaging system
2010 (English)In: OPTICAL MICROLITHOGRAPHY XXIII / [ed] Mircea V. Dusa; Will Conley, SPIE - International Society for Optical Engineering, 2010Conference paper (Refereed)
We have recently explored the Elementary Function method, previously presented by Wald et al (Proc. SPIE 59621G, 2005), and we have demonstrated under what circumstances this method can be used to reduce the propagation calculations of partially coherent light to two dimensions. In this paper, we examine the methods used to measure the spatial coherence of a light source in the literature. We present a method based on work previously shown by Mejia et al (Opt Comm 273 (428-434), 2007) which uses an array of pinholes with one degree of redundancy. We discuss the design of the pinhole array and present the results of some simulations.
Place, publisher, year, edition, pages
SPIE - International Society for Optical Engineering, 2010.
, Proceedings of SPIE-The International Society for Optical Engineering, ISSN 0277-786X ; 7640
optical propagation, partial coherence, information content
Atom and Molecular Physics and Optics
IdentifiersURN: urn:nbn:se:kth:diva-62345DOI: 10.1117/12.846349ISI: 000285084400077ScopusID: 2-s2.0-84905457654ISBN: 978-0-8194-8054-5OAI: oai:DiVA.org:kth-62345DiVA: diva2:480175
Conference on Optical Microlithography XXIII. San Jose, CA. FEB 23-25, 2010
QC 201201202012-01-192012-01-192016-05-23Bibliographically approved