Quality assurance and metrology
2009 (English)In: Ceramic Processing in Microtechnology / [ed] H-J Ritzhaupt-Kleissl, P. Johander, Dunbeath: Whittles Publishing, 2009, 305-325 p.Chapter in book (Other academic)
The cost effective large scale production of reliable micro systems for mechanical and tribological applications requires a customized quality assurance. Equipment and procedures established for the characterization of materials and components on the macro scale very often cannot be successfully applied on the micro scale. Therefore in recent years customized techniques were developed for dimensional control, surface topography and roughness characterization as well as for microstructural analysis, mechanical and tribological testing. This chapter overviews the state-of-the-art of research and technological developments on these fields and thereby responds on the necessary fundamentals of metrology, the constraints of the used equipment and technologies as well as the particular problems arising from characterization of micro components made of ceramic materials.
Place, publisher, year, edition, pages
Dunbeath: Whittles Publishing, 2009. 305-325 p.
microsystems, ceramic materials, dimensional metrology, surface roughness, characterization, microcomponent
Reliability and Maintenance
Research subject SRA - Production
IdentifiersURN: urn:nbn:se:kth:diva-63776ISBN: 978-1904445-84-5OAI: oai:DiVA.org:kth-63776DiVA: diva2:482667
Projects4M Multi Material Micro Manufacture Network of Excellence
FunderXPRES - Initiative for excellence in production research
QC 201201302012-01-242012-01-242012-01-30Bibliographically approved