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Compact X-ray microscopes for EUV- and soft X-radiation with spectral imaging capabilities
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2006 (English)In: Advances in X-Ray/EUV Optics, Components, and Applications / [ed] Khounsary, AM; Morawe, C, 2006, Vol. 6317, 31704-31704 p.Conference paper, Published paper (Refereed)
Abstract [en]

We report on a compact full-field transmission microscope (CTXM) and a scanning transmission microscope (CST'XM) developed for imaging at laboratory scale X-ray sources. The microscopes are based on zone plates for imaging in the EUV and water window region (wavelength 2.3 nm to 4.4 mn). The radiation for the full-field microscope is generated by focusing short laser pulses with an energy of 100 mJ on a 20 gm cryogenic liquid nitrogen jet. A condenser zone plate in conjunction with an aperture is used to provide monochromatic sample illumination. This allows for easy wavelength selection within the N-2,-Emission spectrum. Thus, the presented setup offers the possibility of spectral imaging. A micro zone plate generates a magnified image detected by a back illuminated TE-cooled CCD camera (1,340 x 1,300 pixel). The actual configuration provides magnifications up to 1,000x at exposure times in a range of a few ten minutes with sub-100 nm resolution. Our compact scanning microscope (CSTXM) operates with a zone plate, focusing the radiation onto a sample which is placed on a piezo driven xy-stage with 1 nm lateral resolution. Using high-harmonic radiation at 13 nm wavelength sub-micron resolution is achieved. With light at 17 nm wavelength originating from the O-VI emission line of a laser plasma source based on an ethanol jet, 500 nm structures were imaged in less than 20 minutes resulting in an 100 x 40 pixel image.

Place, publisher, year, edition, pages
2006. Vol. 6317, 31704-31704 p.
Series
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE), ISSN 0277-786X ; 6317
Keyword [en]
full-field X-ray microscopy, scanning X-ray microscopy, zone plate, laser plasma source
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:kth:diva-73336DOI: 10.1117/12.679819ISI: 000241972700004Scopus ID: 2-s2.0-33750594112ISBN: 0-8194-6396-5 (print)OAI: oai:DiVA.org:kth-73336DiVA: diva2:488800
Conference
Conference on Advances in X-Ray/EUV Optics, Components and Applications. San Diego, CA. AUG 14-16, 2006
Note
QC 20120202Available from: 2012-02-02 Created: 2012-02-02 Last updated: 2012-02-03Bibliographically approved

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Vogt, Ulrich

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