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Silicon-based waveguide technology and devices
KTH, School of Information and Communication Technology (ICT), Microelectronics and Information Technology, IMIT.ORCID iD: 0000-0001-5967-2651
2005 (English)In: RECENT RESEARCH DEVELOPMENTS IN OPTICS / [ed] S.G. Pandalai, Research Signpost, 2005, 5, 37-64 p.Chapter in book (Refereed)
Abstract [en]

Silica-on silicon and silicon-based integrated devices are key components for future all-optical communication networks. New challenging trends in the photonic integration are towards photonic lightwave circuits (PLCs), based on silicon platforms for monolithic integration of passive dielectric components with semiconductor active photonic devices and electronic circuits. In this paper a novel low temperature Plasma Enhanced Chemical Vapor Deposition (PECVD) technology for silica-based channel waveguides and waveguide devices is presented. Some of the recently considered solutions for densely integrated PLCs in form of photonic crystal (PhC) structures are also mentioned. Devices based on silica-on-silicon waveguide technology with imprinted Bragg gratings find increasing applications in wavelength-division multiplexed (WDM) optical communication systems as wavelength-selective devices and in optical sensing including biosensors and bioanalytical microtechniques. Presented technologies were applied for the fabrication of some test and new concept devices for optical communication systems. A brief review of these devices is given.

Place, publisher, year, edition, pages
Research Signpost, 2005, 5. 37-64 p.
Keyword [en]
silica-on-silicon, fabrication, photonic integrated circuits
National Category
Natural Sciences
Research subject
URN: urn:nbn:se:kth:diva-74877ISBN: 81-308-0004-7OAI: diva2:490142

QC 20120301

Available from: 2012-02-03 Created: 2012-02-03 Last updated: 2013-04-11Bibliographically approved

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Wosinski, Lech
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