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How reliable are surface roughness measurements of micro-features?: Experiences of a Round Robin test within nine 4M laboratories
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics.
TNO Science and Industry, 5600 HE Eindhoven, The Netherlands.
Tekniker Technological Center, 20600 Eibar, Spain.
Manufacturing Engineering Centre, Cardiff University, Cardiff CF24 3AA, UK.
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2008 (English)In: 4M 2008: Proceedings of the 4th International Conference on Multi-Material Micro Manufacture / [ed] S. Dimov and W. Menz, Dunbeath: Whittles Publishing, 2008, 139-142 p.Conference paper (Refereed)
Abstract [en]

Surface roughness of tiny micro machined features is not easy to verify. The statistical variation of the surface itself can be the limiting factor that hampers tolerance verification. In this paper we have studied this effect and we also test the performance of 10 different surface profilers over a very well specified surface area. For this area 6 profilers yielded the same result within a standard deviation window of ±6%. For other areas, on top of narrow bars and in narrow and deep channels, a much larger spread in the Round Robin results were found.

Place, publisher, year, edition, pages
Dunbeath: Whittles Publishing, 2008. 139-142 p.
Keyword [en]
Surface roughness, Micro metrology, Round robin, Surface profile, Ra, Pa
National Category
Nano Technology Production Engineering, Human Work Science and Ergonomics
Research subject
SRA - Production
URN: urn:nbn:se:kth:diva-77491ISBN: 978-1904445-76-0OAI: diva2:491882
4M 2008. Cardiff, Wales, UK. 9th - 11th September 2008
4M Multi Material Micro Manufacture Network of Excellence
XPRES - Initiative for excellence in production research
QC 20120509Available from: 2012-02-07 Created: 2012-02-07 Last updated: 2012-05-09Bibliographically approved

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