Repeatability analysis of two methods for height measurements in the micrometer range
2006 (English)In: 4M 2006 Second International Conference on Multi-Material Micro Manufacture / [ed] Wolfgang Menz, Stefan Dimov and Bertrand Fillon, Amsterdam: Elsevier, 2006, 165-168 p.Conference paper (Refereed)
A precision study of two height measuring methods is carried out. The first method is based on a White Light Interferometer (WLI) and the second on a Co-ordinate Measuring Machine (CMM) equipped with an optical probe. The height measurements considered are in the range [150; 250] μm. Point and interval estimates of repeatability are reported in the paper. This study presents experimental evidence that, under repeatability conditions, the precision of the WLI method is about five times higher than that of the optical CMM method. Furthermore, the precision of WLI is constant over the investigated height range whereas a dependency of the CMM precision on the nominal dimensions is identified. For both methods a linear relationship is detected between the random error and the sequence in which the measurements are taken.
Place, publisher, year, edition, pages
Amsterdam: Elsevier, 2006. 165-168 p.
Repeatability, White light interferometry, CMM, Micro metrology
Production Engineering, Human Work Science and Ergonomics Nano Technology
Research subject SRA - Production
IdentifiersURN: urn:nbn:se:kth:diva-78537ISBN: 978-0-08-045263-9ISBN: 0-08-045263-0OAI: oai:DiVA.org:kth-78537DiVA: diva2:492630
4M 2006, 20-22 Sept, Grenoble, France
Projects4M Multi Material Micro Manufacture Network of Excellence
FunderXPRES - Initiative for excellence in production research
QC 201202202012-02-082012-02-082012-02-20Bibliographically approved