Metrology Applications of Two-Dimensional Frequency Analysis for Micro-Features Characterisation
2005 (English)In: 4M 2005 First International Conference on Multi-Material Micro Manufacture / [ed] Wolfgang Menz and Stefan Dimov, Amsterdam: Elsevier, 2005, 259-262 p.Conference paper (Refereed)
In this paper, the characterisation of micro-features involved in metrology applications within the scope of 4M is carried out through the use of different two-dimensional frequency analysis procedures. Firstly, the analysis methods are introduced and their basic principles are illustrated. Secondly, selected test cases, representing the issue of experimental research activities performed at the laboratory sites of the co-author’s partner organisations, are presented with reference to diverse metrology purposes in different fields of applications.
Place, publisher, year, edition, pages
Amsterdam: Elsevier, 2005. 259-262 p.
2D Frequency Analysis, Surface, Micro-Features, Metrology, Surface roughness, Power Spectrum
Production Engineering, Human Work Science and Ergonomics Nano Technology
IdentifiersURN: urn:nbn:se:kth:diva-78587ISBN: 0-080-44879-8OAI: oai:DiVA.org:kth-78587DiVA: diva2:492674
4M 2005, 29 June - 1 July 2005, Karlsruhe, Germany
Projects4M Multi Material Micro Manufacture Network of Excellence
QC 201202292012-02-082012-02-082012-02-29Bibliographically approved