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Metrology Applications of Two-Dimensional Frequency Analysis for Micro-Features Characterisation
Department of Materials and Production Engineering, University of Naples Federico II, Piazzale Tecchio 80, 80125 Naples, Italy.
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics.ORCID iD: 0000-0002-0105-4102
Laboratory for Alternative Technologies, Faculty of Mechanical Engineering, University of Ljubljana, Askerceva 6, SI-1000 Ljubljana, Slovenia.
Laboratory for Alternative Technologies, Faculty of Mechanical Engineering, University of Ljubljana, Askerceva 6, SI-1000 Ljubljana, Slovenia.
2005 (English)In: 4M 2005 First International Conference on Multi-Material Micro Manufacture / [ed] Wolfgang Menz and Stefan Dimov, Amsterdam: Elsevier, 2005, 259-262 p.Conference paper, Published paper (Refereed)
Abstract [en]

In this paper, the characterisation of micro-features involved in metrology applications within the scope of 4M is carried out through the use of different two-dimensional frequency analysis procedures. Firstly, the analysis methods are introduced and their basic principles are illustrated. Secondly, selected test cases, representing the issue of experimental research activities performed at the laboratory sites of the co-author’s partner organisations, are presented with reference to diverse metrology purposes in different fields of applications.

Place, publisher, year, edition, pages
Amsterdam: Elsevier, 2005. 259-262 p.
Keyword [en]
2D Frequency Analysis, Surface, Micro-Features, Metrology, Surface roughness, Power Spectrum
National Category
Production Engineering, Human Work Science and Ergonomics Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-78587ISBN: 0-080-44879-8 (print)OAI: oai:DiVA.org:kth-78587DiVA: diva2:492674
Conference
4M 2005, 29 June - 1 July 2005, Karlsruhe, Germany
Projects
4M Multi Material Micro Manufacture Network of Excellence
Note
QC 20120229Available from: 2012-02-08 Created: 2012-02-08 Last updated: 2012-02-29Bibliographically approved

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